(19)
(11) EP 1 623 449 A2

(12)

(43) Date of publication:
08.02.2006 Bulletin 2006/06

(21) Application number: 04719204.2

(22) Date of filing: 10.03.2004
(51) International Patent Classification (IPC): 
H01L 21/00(1974.07)
(86) International application number:
PCT/US2004/007280
(87) International publication number:
WO 2004/081985 (23.09.2004 Gazette 2004/39)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 11.03.2003 US 453774 P

(71) Applicant: Inficon Lt, Inc.
Cambridge, MA 02142 (US)

(72) Inventors:
  • PELLEGRINI, Joseph
    Cohasset, MA 02025 (US)
  • CROW, David
    Maple Grove, MN 55311 (US)

(74) Representative: Boyce, Conor et al
F.R. Kelly & Co. 27 Clyde Road Ballsbridge
IRL-Dublin 4
IRL-Dublin 4 (IE)

   


(54) METHODS AND SYSTEMS FOR ESTIMATING RETICLE BIAS STATES