METHODS AND SYSTEMS FOR ESTIMATING RETICLE BIAS STATES - Patent 1623449

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EP 1 623 449 A2

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(43)	Date of publication:
	08.02.2006 Bulletin 2006/06

(21)	Application number: 04719204.2

(22)	Date of filing: 10.03.2004

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International Patent Classification (IPC):

H01L 21/00^(1974.07)

(86)	International application number:
	PCT/US2004/007280

(87)	International publication number:
	WO 2004/081985 (23.09.2004 Gazette 2004/39)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
	Designated Extension States:
	AL LT LV MK

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Priority:

11.03.2003 US 453774 P

(71)	Applicant: Inficon Lt, Inc.
	Cambridge, MA 02142 (US)

(72)	Inventors:
	PELLEGRINI, Joseph Cohasset, MA 02025 (US) CROW, David Maple Grove, MN 55311 (US)

(74)	Representative: Boyce, Conor et al
	F.R. Kelly & Co. 27 Clyde Road Ballsbridge IRL-Dublin 4 IRL-Dublin 4 (IE)

(54)	METHODS AND SYSTEMS FOR ESTIMATING RETICLE BIAS STATES