ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIRO..CY..TRBGCZEEHUPLSK....IS..............................JDIM360 Ver 2.15 (14 Jul 2008) - 2999001/01628324CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120110126W173deBibliographieenBibliographyfrBibliographieEP05255082.9200508172008010420080509enenen60321120040820US7424920050307US17746520050708US2011012620110420060222200608201012152010502010070820110126201104H01J 37/34 20060101AFI20051201BHEP C23C 14/35 20060101ALI20051201BHEP deMagnetron-SputteranlageenMagnetron sputtering devicefrDispositif de pulvérisation magnétronDE-A1- 3 934 887US-A- 5 795 448US-A- 5 911 861US-A1- 2001 015 438Tilsch, Markus K.4506 Byrne Court, Santa RosaCalifornia 95409USSeddon, Richard I.2245 Cummings Dr., Santa RosaCalifornia 95404USOckenfuss, Georg J.917 Saint Helena Avenue, Santa RosaCalifornia 95404USHayes, Jeremy1920 Peterson Ln., Santa RosaCalifornia 95403USKlinger, Robert E.7376 Circle Drive, Rohnert ParkCalifornia 94928USJDS Uniphase Corporation100777517jds.4565.ep.nm.430 N. McCarthy BoulevardMilpitas, CA 95035USWalker, Stephenet al101093372Murgitroyd & Company Scotland House 165-169 Scotland StreetGlasgow G5 8PLGBATBEBGCHCYCZDEDKEEESFIFRGBGRHUIEISITLILTLULVMCNLPLPTROSESISKTR20070704200727