(19)

(11)

EP 1 629 246 A2

(12)

(88) Date of publication A3: 31.03.2005 (43) Date of publication: 01.03.2006 Bulletin 2006/09 (21) Application number: 04753338.5 (22) Date of filing: 26.05.2004

(51) International Patent Classification (IPC):  F28F 27/00(1968.09) (86) International application number: PCT/US2004/016495 (87) International publication number: WO 2004/109757 (16.12.2004 Gazette 2004/51)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR (30) Priority: 05.06.2003 US 455004 (71) Applicant: NIKON CORPORATION Tokyo 100-8331 (JP)	(72) Inventor: HAZELTON, Andrew, J. San Carlos, CA 94070 (US) (74) Representative: HOFFMANN EITLE  Patent- und Rechtsanwälte Arabellastrasse 4 81925 München 81925 München (DE)