(19)
(11) EP 1 631 396 A2

(12)

(88) Date of publication A3:
15.09.2005

(43) Date of publication:
08.03.2006 Bulletin 2006/10

(21) Application number: 04776442.8

(22) Date of filing: 10.06.2004
(51) International Patent Classification (IPC): 
B08B 3/12(1974.07)
B08B 7/04(1968.09)
B08B 6/00(1974.07)
B08B 3/00(1968.09)
(86) International application number:
PCT/US2004/018464
(87) International publication number:
WO 2005/006396 (20.01.2005 Gazette 2005/03)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL HR LT LV MK

(30) Priority: 11.06.2003 US 477602 P

(71) Applicant: Goldfinger Technologies, LLC
Allentown, Pennsylvania 18106 (US)

(72) Inventors:
  • FRANKLIN, Cole, S.
    San Clemente, CA 92672 (US)
  • WU, Yi
    Irvine, CA 92612 (US)
  • FRASER, Brian
    Los Angeles, CA 90027 (US)

(74) Representative: Pichat, Thierry et al
Novagraaf Technologies, 122, rue Edouard Vaillant
92593 Levallois-Perret Cedex
92593 Levallois-Perret Cedex (FR)

   


(54) MEGASONIC CLEANING USING SUPERSATURATED CLEANING SOLUTION