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(11)

EP 1 631 863 A2

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(88) Date of publication A3: 10.02.2005 (43) Date of publication: 08.03.2006 Bulletin 2006/10 (21) Application number: 04731579.1 (22) Date of filing: 07.05.2004

(51) International Patent Classification (IPC):  G03F 7/039(1990.01) G03F 7/004(1990.01) (86) International application number: PCT/EP2004/004867 (87) International publication number: WO 2004/102272 (25.11.2004 Gazette 2004/48)

(84) Designated Contracting States: DE FR (30) Priority: 16.05.2003 US 440542 (71) Applicant: AZ Electronic Materials USA Corp. Somerville, NJ 08876 (US)

(72) Inventors: LEE, Sangho Bridgewater, NJ 08807 (US) RAHMAN, Dalil, M. Flemington, NJ 08822 (US) MCKENZIE, Douglas Easten, PA 18045 (US) KIM, Woo-Kyu Bedminster, NJ 07921 (US) PADMANABAN, Munirathna Bridgewater, NJ 08807 (US) OBERLANDER, Joseph, E. Phillipsburg, NJ 08865 (US) TOUKHY, Medhat, A. Flemington, NJ 08822 (US) (74) Representative: Isenbruck, Günter  Isenbruck Bösl Hörschler Wichmann Huhn Patentanwälte Theodor-Heuss-Anlage 12 D-68165 Mannheim D-68165 Mannheim (DE)