(19)
(11) EP 1 636 400 A1

(12)

(43) Date of publication:
22.03.2006 Bulletin 2006/12

(21) Application number: 04753532.3

(22) Date of filing: 27.05.2004
(51) International Patent Classification (IPC): 
C23C 16/44(1985.01)
H01L 21/768(1995.01)
 C23C 16/448(2000.01)
(86) International application number:
PCT/US2004/016715
(87) International publication number:
WO 2004/106584 (09.12.2004 Gazette 2004/50)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(30) Priority: 27.05.2003 US 447255
05.06.2003 US 477478 P

(71) Applicant: APPLIED MATERIALS, INC.
Santa Clara, California 95054 (US)

(72) Inventors:
  • CHEN, Ling
    Sunnyvale, CA 94087 (US)
  • KU, Vincent W.
    San Jose, CA 95132 (US)
  • CHUNG, Hua
    San Jose, CA 95129 (US)
  • MARCADAL, Christophe
    Sunnyvale, CA 94087 (US)
  • GANGULI, Seshadri
    Sunnyvale, CA 94086 (US)
  • LIN, Jenny
    Saratoga, CA 95070 (US)
  • WU, Dien-Yeh
    San Jose, CA 95129 (US)
  • OUYE, Alan
    San Mateo, CA 94401 (US)
  • CHANG, Mei
    Saratoga, CA 95070 (US)

(74) Representative: Zimmermann, Gerd Heinrich et al
Zimmermann & Partner, P.O. Box 33 09 20
80069 München
80069 München (DE)

   


(54) METHOD AND APPARATUS FOR GENERATING A PRECURSOR FOR A SEMICONDUCTOR PROCESSING SYSTEM