(19)

(11)

EP 1 636 849 A2

(12)

(88) Date of publication A3: 24.11.2005 (43) Date of publication: 22.03.2006 Bulletin 2006/12 (21) Application number: 04752639.7 (22) Date of filing: 18.05.2004

(51) International Patent Classification (IPC):  H01L 29/76(1974.07) H01L 29/792(1990.01) H01L 29/788(1990.01) (86) International application number: PCT/US2004/015651 (87) International publication number: WO 2005/001840 (06.01.2005 Gazette 2005/01)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR Designated Extension States: AL HR LT LV MK (30) Priority: 18.06.2003 US 465718 (71) Applicant: ATMEL CORPORATION San Jose, California 95131 (US)	(72) Inventor: LOHEK, Bohumil Colorado Springs, CO 80906 (US) (74) Representative: Käck, Jürgen  Patentanwälte Kahler Käck Mollekopf Vorderer Anger 239 86899 Landsberg 86899 Landsberg (DE)