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Benannte Vertragsstaaten: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI
SK TR |
| (30) |
Priorität: |
24.06.2004 AT 10782004
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Veröffentlichungstag der Anmeldung: |
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22.03.2006 Patentblatt 2006/12 |
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Patentinhaber: |
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- CTR Carinthian Tech Research AG
9524 Villach-St. Magdalen (AT)
- Fraunhofer-Gesellschaft zur Förderung der
angewandten Forschung e.V.
80686 München (DE)
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Erfinder: |
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- Kenda, Andreas, Dr.
9020 Klagenfurt (AT)
- Scherf, Werner, Dr.
9500 Villach (AT)
- Kraft, Martin, Dr.
9500 Villach (AT)
- Schenk, Harald, Dr.
01139 Dresden (DE)
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| (74) |
Vertreter: Beer & Partner Patentanwälte KG |
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Lindengasse 8 1070 Wien 1070 Wien (AT) |
| (56) |
Entgegenhaltungen: :
EP-A1- 1 123 526 US-B1- 6 384 952
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WO-A2-01/73934
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- SOLF C, MOHR J UND WALLRABE U: "Miniaturized LIGA Fourier transformation spectrometer"
PROCEEDINGS OF IEEE SENSORS, Bd. 2, 2003, Seiten 773-776, XP010691012 ISBN: 0-7803-8133-5
- ANTILA J, SAARI H UND OJA A: "Micro-electromechanical mirror for Fourier transform
interferometry" VTT INFORMATION TECHNOLOGY, [Online] 2003, Seiten 1-6, XP002354532
Gefunden im Internet: URL:http://www.vtt.fi/tte/optical_sensors/ spectrometer-files/Antila_4thRT_on_MTN_pro
c_paper_v3.pdf> [gefunden am 2005-11-16]
- GONZALEZ C ET AL: "Mesoscopic optical instrumentation: a miniature Fourier transform
spectrometer" LASERS AND ELECTRO-OPTICS SOCIETY ANNUAL MEETING, 1997. LEOS '97 10TH
ANNUAL MEETING. CONFERENCE PROCEEDINGS., IEEE SAN FRANCISCO, CA, USA 10-13 NOV. 1997,
NEW YORK, NY, USA,IEEE, US, Bd. 2, 10. November 1997 (1997-11-10), Seiten 474-475,
XP010252840 ISBN: 0-7803-3895-2
- CROCOMBE R: "MEMS technology moves process spectroscopy into a new dimension" SPECTROSCOPY
EUROPE, Bd. 16, Nr. 3, 1. Juni 2004 (2004-06-01), Seiten 16-19, XP002354533
- KUNG H L ET AL: "STANDING-WAVE TRANSFORM SPECTROMETER BASED ON INTEGRATED MEMS MIRROR
AND THIN-FILM PHOTODETECTOR" IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS,
IEEE SERVICE CENTER, US, Bd. 8, Nr. 1, Januar 2002 (2002-01), Seiten 98-105, XP001116250
ISSN: 1077-260X
- BHALOTRA S R ET AL: "Parallel-plate MEMS mirror design for large on-resonance displacement",
OPTICAL MEMS, 2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON 21-24 AUGUST 2000, PISCATAWAY,
NJ, USA,IEEE, 21 August 2000 (2000-08-21), pages 93-94, XP010518553, DOI: 10.1109/OMEMS.2000.879642
ISBN: 978-0-7803-6257-4
- SCHENK H ET AL: "Optical MEMS for advanced spectrometers", OPTICAL MEMS AND THEIR
APPLICATIONS CONFERENCE, 2005. IEEE/LEOS INTERN ATIONAL CONFERENCE ON OULU, FINLAND
AUG. 1-4, 2005, PISCATAWAY, NJ, USA,IEEE, 1 August 2005 (2005-08-01), pages 117-118,
XP010853277, ISBN: 978-0-7803-9278-6
- MANZARDO ET AL.: "Miniturized time-scanning Fourier transfrom spectrometer based on
silicon technology", OPTICS LETTERS, vol. 24, 1999, pages 1705-1707, XP903937,
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