(19)
(11) EP 1 639 628 A2

(12)

(88) Date of publication A3:
28.04.2005

(43) Date of publication:
29.03.2006 Bulletin 2006/13

(21) Application number: 04754527.2

(22) Date of filing: 04.06.2004
(51) International Patent Classification (IPC): 
H01L 21/00(1974.07)
(86) International application number:
PCT/US2004/017937
(87) International publication number:
WO 2005/006395 (20.01.2005 Gazette 2005/03)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(30) Priority: 26.06.2003 US 607337
27.01.2004 US 765660

(71) Applicant: Thermal Corp.
Wilmington, DE 19801 (US)

(72) Inventors:
  • ROSENFELD, John, H.
    Lancaster, PA 17603 (US)
  • ERNST, Donald, M.
    Lancaster, PA 17601 (US)

(74) Representative: Olgemöller, Luitgard Maria et al
Leonhard - Olgemöller - Fricke, Patentanwälte, Postfach 10 09 62
80083 München
80083 München (DE)

   


(54) HEAT TRANSFER DEVICE AND METHOD OF MAKING SAME