(84) |
Designated Contracting States: |
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AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
(30) |
Priority: |
18.12.2000 JP 2000383102 03.12.2001 JP 2001368241
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(62) |
Application number of the earlier application in accordance with Art. 76 EPC: |
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01271675.9 / 1347533 |
(71) |
Applicant: MITSUBISHI MATERIALS CORPORATION |
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Chiyoda-ku,
Tokyo 100-8117 (JP) |
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(72) |
Inventors: |
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- Endo, Takanori,
c/o Mitsubishi Materials Corp.
Bunkyo-ku,
Tokyo (JP)
- Yonezawa, Tadashi,
c/o Mitsubishi Materials Corp.
Bunkyo-ku,
Tokyo (JP)
- Yahata, Seiro,
c/o Mitsubishi Materials Corp.
Bunkyo-ku,
Tokyo (JP)
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(74) |
Representative: HOFFMANN EITLE |
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Patent- und Rechtsanwälte
Arabellastrasse 4 81925 München 81925 München (DE) |
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