(19)

(11)

EP 1 642 328 A1

(12)

(43) Date of publication: 05.04.2006 Bulletin 2006/14 (21) Application number: 04751945.9 (22) Date of filing: 11.05.2004

(51) International Patent Classification (IPC):  H01L 21/302(1974.07) (86) International application number: PCT/US2004/014800 (87) International publication number: WO 2005/001918 (06.01.2005 Gazette 2005/01)

(84) Designated Contracting States: DE FR GB (30) Priority: 11.06.2003 US 477810 P 26.08.2003 US 498036 P (71) Applicant: Honeywell International, Inc. Morristown, NJ 07962 (US)	(72) Inventors: KIM, Jaeyeon Liberty Lake, WA 99019 (US) PHELAN, Terry, J. Spokane, WA 99216 (US) MIZE, John, D. Spokane Valley, WA 99216 (US) (74) Representative: Fox-Male, Nicholas Vincent Humbert  Eric Potter Clarkson LLP Park View House 58 The Ropewalk Nottingham NG1 5DD Nottingham NG1 5DD (GB)