......DE....FRGB................................................................*XDIM360 (Ver 1.5 21 Nov 2005) - 1100000/0 1710000/01642328A120060405EP04751945.92004051120060105enenen477810 P20030611US498036 P20030826US2006040520061420060405200614H01L 21/302 19740701AFI20050113BHEP deFALLEN ZUM EINFANGEN VON PARTIKELN IN ABLAGERUNGSKAMMERNenTRAPS FOR PARTICLE ENTRAPMENT IN DEPOSITION CHAMBERSfrPIEGES DESTINES A PIEGER DES PARTICULES DANS DES CHAMBRES DE DEPOTHoneywell International, Inc.03077231WELEB/P33747EPLaw Dept. AB2, Box 2245, 101 Columbia RoadMorristown, NJ 07962USKIM, Jaeyeon1018 N. Simpson RoadLiberty Lake, WA 99019USPHELAN, Terry, J.4806 North Best RoadSpokane, WA 99216USMIZE, John, D.13518 E. Redlin DriveSpokane Valley, WA 99216USFox-Male, Nicholas Vincent Humbert00057741Eric Potter Clarkson LLP Park View House 58 The RopewalkNottingham NG1 5DDGBDEFRGBUS200401480020040511enWO200500191820050106200501