(19)

(11)

EP 1 644 549 A2

(12)

(88) Date of publication A3: 07.07.2005 (43) Date of publication: 12.04.2006 Bulletin 2006/15 (21) Application number: 04752548.0 (22) Date of filing: 18.05.2004

(51) International Patent Classification (IPC):  C23C 8/00(1985.01) (86) International application number: PCT/US2004/015552 (87) International publication number: WO 2004/104245 (02.12.2004 Gazette 2004/49)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR (30) Priority: 20.05.2003 US 471992 P 22.04.2004 US 829818 (71) Applicant: ExxonMobil Research and Engineering Company Annandale, NJ 08801-0900 (US)

(72) Inventors: CHUN, ChangMin Belle Mead, NJ 08502 (US) BANGARU, Narasimha-Rao Ventaka Annandale, NJ 08801 (US) JIN, Hyun-Woo Phillipsburg, NJ 08865 (US) KOO, Jayoung Bridgewater, NJ 08807 (US) PETERSON, John, Roger Ashburn, VA 20147 (US) ANTRAM, Robert, Lee Warrenton, VA 20186 (US) FOWLER, Christopher, John Springfield, VA 22150 (US) (74) Representative: Mareschal, Anne et al ExxonMobil Chemical Europe Inc. IP Law Shared Services Hermeslaan 2 1831 Machelen 1831 Machelen (BE)