(19)
(11) EP 1 644 557 A1

(12)

(43) Date of publication:
12.04.2006 Bulletin 2006/15

(21) Application number: 04756864.7

(22) Date of filing: 08.07.2004
(51) International Patent Classification (IPC): 
C25B 9/08(2000.01)
C25B 15/02(1974.07)
C25D 7/12(1974.07)
C25D 21/00(1974.07)
 C25B 13/08(1974.07)
C25D 3/38(1974.07)
C25D 17/00(1974.07)
H01L 21/00(1974.07)
(86) International application number:
PCT/US2004/022183
(87) International publication number:
WO 2005/007933 (27.01.2005 Gazette 2005/04)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(30) Priority: 08.07.2003 US 616044
24.07.2003 US 627336

(71) Applicant: APPLIED MATERIALS, INC.
Santa Clara, California 95054-3299 (US)

(72) Inventors:
  • YANG, Michael X
    Palo Alto, CA 94306 (US)
  • LUBOMIRSKY, Dmitry
    Cupertino, CA 95014 (US)
  • DORDI, Yezdi N.
    Palo Alto, CA 94303 (US)
  • SINGH, Saravjeet
    Santa Clara, CA 95051 (US)
  • TULSHIBAGWALE, Sheshraj L.
    Los Altos, CA 94024 (US)
  • KOVARSKY, Nicolay Y.
    Sunnyvale, CA 94087 (US)

(74) Representative: Bayliss, Geoffrey Cyril 
Boult Wade Tennant Verulam Gardens 70 Gray's Inn Road
GB-London WC1X 8BT
GB-London WC1X 8BT (GB)

   


(54) ELECTROCHEMICAL PROCESSING CELL