(19)
(11) EP 1 644 777 A2

(12)

(88) Date of publication A3:
14.04.2005

(43) Date of publication:
12.04.2006 Bulletin 2006/15

(21) Application number: 04747446.5

(22) Date of filing: 06.07.2004
(51) International Patent Classification (IPC): 
G03F 7/004(1990.01)
(86) International application number:
PCT/JP2004/009980
(87) International publication number:
WO 2005/003859 (13.01.2005 Gazette 2005/02)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(30) Priority: 08.07.2003 JP 2003193831
24.07.2003 US 489493 P

(71) Applicant: Showa Denko K.K.
Tokyo 105-8518 (JP)

(72) Inventors:
  • Ishigaki, Satoru, c/o Corp. R&D Center (kawasaki)
    Kawasaki-shi, Kanagawa 2100867 (JP)
  • Matsuki, Kunio, c/o Corp. R&D Center (kawasaki)
    Kawasaki-shi, Kanagawa 2100867 (JP)

(74) Representative: Strehl Schübel-Hopf & Partner 
Maximilianstrasse 54
80538 München
80538 München (DE)

   


(54) RESIST COMPOSITION