(19)
(11) EP 1 647 060 A1

(12)

(43) Date of publication:
19.04.2006 Bulletin 2006/16

(21) Application number: 04757192.2

(22) Date of filing: 20.07.2004
(51) International Patent Classification (IPC): 
H01L 45/00(1974.07)
(86) International application number:
PCT/US2004/023497
(87) International publication number:
WO 2005/011011 (03.02.2005 Gazette 2005/05)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(30) Priority: 21.07.2003 US 488921 P

(71) Applicant: Unaxis USA Inc.
St. Petersburg, FL 33718 (US)

(72) Inventors:
  • LEE, Yao-Sheng
    Tampa, FL 34677 (US)
  • DEVRE, Mike
    Safety Harbor, FL 34695 (US)

(74) Representative: Lorenz, Werner 
Lorenz & Kollegen, Alte Ulmer Strasse 2
89522 Heidenheim
89522 Heidenheim (DE)

   


(54) ETCHING METHOD FOR MAKING CHALCOGENIDE MEMORY ELEMENTS