(19)
(11)
EP 1 647 060 A1
(12)
(43)
Date of publication:
19.04.2006
Bulletin 2006/16
(21)
Application number:
04757192.2
(22)
Date of filing:
20.07.2004
(51)
International Patent Classification (IPC):
H01L
45/00
(1974.07)
(86)
International application number:
PCT/US2004/023497
(87)
International publication number:
WO 2005/011011
(
03.02.2005
Gazette 2005/05)
(84)
Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
(30)
Priority:
21.07.2003
US 488921 P
(71)
Applicant:
Unaxis USA Inc.
St. Petersburg, FL 33718 (US)
(72)
Inventors:
LEE, Yao-Sheng
Tampa, FL 34677 (US)
DEVRE, Mike
Safety Harbor, FL 34695 (US)
(74)
Representative:
Lorenz, Werner
Lorenz & Kollegen, Alte Ulmer Strasse 2
89522 Heidenheim
89522 Heidenheim (DE)
(54)
ETCHING METHOD FOR MAKING CHALCOGENIDE MEMORY ELEMENTS