(19)
(11) EP 1 648 658 A2

(12)

(88) Date of publication A3:
31.03.2005

(43) Date of publication:
26.04.2006 Bulletin 2006/17

(21) Application number: 04757017.1

(22) Date of filing: 01.07.2004
(51) International Patent Classification (IPC): 
B24B 37/04(1968.09)
 H01L 21/321(1990.01)
(86) International application number:
PCT/US2004/022722
(87) International publication number:
WO 2005/002794 (13.01.2005 Gazette 2005/02)
(84) Designated Contracting States:
FR NL

(30) Priority: 01.07.2003 US 484189 P
15.08.2003 US 642128
03.11.2003 US 516680 P

(71) Applicant: APPLIED MATERIALS, INC.
Santa Clara, California 95054 (US)

(72) Inventors:
  • WANG, Yan
    Sunnyvale, CA 94087 (US)
  • NEO, Siew S.
    Santa Clara, CA 95051 (US)
  • LIU, Feng, Q.
    San Jose, CA 95129 (US)
  • TSAI, Stan D.
    Fremont, CA 94555 (US)
  • HU, Yongqi
    San Jose, CA 95131 (US)
  • DUBOUST, Alain
    Sunnyvale, CA 94086 (US)
  • MANENS, Antoine P.
    Palo Alto, CA 94306 (US)
  • WADENSWEILER, Ralph, M.
    Sunnyvale, CA 94087 (US)
  • MAVLIV, Rashid
    Santa Clara, CA 95050 (US)
  • CHEN, Liang-Yuh
    Foster City, CA 94404 (US)
  • OLGADO, Donald, J.K.
    Palo Alto, CA 94301 (US)
  • BUTTERFIELD, Paul, D.
    San Jose, CA 95124 (US)
  • TSENG, Ming-Kuei
    Saratoga, CA 95070 (US)
  • CHANG, Shou-Sung
    Stanford, CA 94309 (US)
  • SUN, Lizhong
    San Jose, CA 95123 (US)

(74) Representative: Bayliss, Geoffrey Cyril 
BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB)

   


(54) CELL, SYSTEM AND ARTICLE FOR ELECTROCHEMICAL MECHANICAL PROCESSING (ECMP)