(19)
(11) EP 1 648 974 A2

(12)

(43) Date of publication:
26.04.2006 Bulletin 2006/17

(21) Application number: 04779276.7

(22) Date of filing: 27.07.2004
(51) International Patent Classification (IPC): 
C09G 1/02(1968.09)
B24B 1/00(1968.09)
C09G 1/04(1968.09)
C01G 39/02(1980.01)
(86) International application number:
PCT/US2004/024143
(87) International publication number:
WO 2005/012451 (10.02.2005 Gazette 2005/06)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL HR LT LV MK

(30) Priority: 30.07.2003 US 631698
13.05.2004 US 846718

(71) Applicant: Climax Engineered Materials, LLC
Phoenix, AZ 85004-2306 (US)

(72) Inventors:
  • BABU, S., V.
    Potsdam, NY 13676 (US)
  • HEGDE, Sharath
    Potsdam, NY 13676 (US)
  • JHA,Sunil
    Oro Valley, AZ 85737 (US)
  • PATRI, Udaya, B.
    Potsdam, NY 13676 (US)
  • HONG, Youngki
    Potsdam, NY 13676 (US)

(74) Representative: Tönhardt, Marion 
Forrester & Boehmert, Pettenkoferstrasse 20-22
80336 München
80336 München (DE)

   


(54) SLURRIES AND METHODS FOR CHEMICAL-MECHANICAL PLANARIZATION OF COPPER