(84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
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(30) |
Priority: |
08.07.2003 US 616097
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(71) |
Applicant: APPLIED MATERIALS, INC. |
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Santa Clara, California 95054 (US) |
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(72) |
Inventors: |
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- SUN, Zhi-Wen
San Jose, CA 95136 (US)
- HE, Renren
Sunnyvale, CA 94087 (US)
- WANG, You
Cupertino, CA 95014 (US)
- WANG, Michael X.
Palo Alto, CA 94306 (US)
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(74) |
Representative: Bayliss, Geoffrey Cyril |
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BOULT WADE TENNANT,
Verulam Gardens
70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB) |
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