(19)

(11)

EP 1 652 217 A2

(12)

(43) Date of publication: 03.05.2006 Bulletin 2006/18 (21) Application number: 04777926.9 (22) Date of filing: 08.07.2004

(51) International Patent Classification (IPC):  H01L 21/00(1974.07) (86) International application number: PCT/US2004/022146 (87) International publication number: WO 2005/008729 (27.01.2005 Gazette 2005/04)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR Designated Extension States: AL HR LT LV MK (30) Priority: 09.07.2003 FR 0308405 04.06.2004 US 861683 (71) Applicant: ATMEL CORPORATION San Jose, California 95131 (US)	(72) Inventor: VERGNES, Alain 13530 Trets (FR) (74) Representative: Leeming, John Gerard  J.A. Kemp & Co., 14 South Square, Gray's Inn London WC1R 5JJ London WC1R 5JJ (GB)