(19)
(11) EP 1 652 220 A1

(12)

(43) Date of publication:
03.05.2006 Bulletin 2006/18

(21) Application number: 04749221.0

(22) Date of filing: 06.07.2004
(51) International Patent Classification (IPC): 
H01L 21/02(1974.07)
H01L 27/115(1990.01)
 H01L 21/311(1990.01)
H01L 21/28(1974.07)
(86) International application number:
PCT/SG2004/000199
(87) International publication number:
WO 2005/010958 (03.02.2005 Gazette 2005/05)
(84) Designated Contracting States:
DE FR GB

(30) Priority: 28.07.2003 US 629326

(71) Applicant: Infineon Technologies AG
81669 München (DE)

(72) Inventors:
  • EGGER, Ulrich
    01067 Dresden (DE)
  • ZHUANG, Haoren
    Wallkill, NY 12589 (US)
  • BRUCHHAUS, Rainer
    89636 Munich (DE)

(74) Representative: Howe, Steven 
Lloyd Wise Commonwealth House, 1-19 New Oxford Street
London WC1A 1LW
London WC1A 1LW (GB)

   


(54) FABRICATION OF A FERAM CAPACITOR USING A NOBLE METAL HARDMASK