(19)

(11)

EP 1 656 589 A2

(12)

(88) Date of publication A3: 02.06.2005 (43) Date of publication: 17.05.2006 Bulletin 2006/20 (21) Application number: 04781405.8 (22) Date of filing: 17.08.2004

(51) International Patent Classification (IPC):  G03F 7/004(1990.01) (86) International application number: PCT/US2004/026701 (87) International publication number: WO 2005/019934 (03.03.2005 Gazette 2005/09)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR (30) Priority: 22.08.2003 JP 2003208442 (71) Applicant: 3M Innovative Properties Company St. Paul, MN 55133-3427 (US)	(72) Inventor: YOKOYAMA, Chikafumi Sagamihara, Kanagawa 229-1185 (JP) (74) Representative: Vossius & Partner  Siebertstrasse 4 81675 München 81675 München (DE)