(19)
(11) EP 1 656 688 A2

(12)

(88) Date of publication A3:
04.08.2005

(43) Date of publication:
17.05.2006 Bulletin 2006/20

(21) Application number: 04778627.2

(22) Date of filing: 19.07.2004
(51) International Patent Classification (IPC): 
H01J 49/10(1980.01)
H01J 49/16(1980.01)
H01J 61/68(1968.09)
H01J 49/42(1980.01)
H01J 49/40(1980.01)
H01J 27/24(1980.01)
H01J 61/90(1968.09)
(86) International application number:
PCT/US2004/023217
(87) International publication number:
WO 2005/017943 (24.02.2005 Gazette 2005/08)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(30) Priority: 17.07.2003 US 488019 P
27.08.2003 US 498093 P
27.08.2003 US 498163 P
08.11.2003 US 518367 P

(71) Applicant: Sionex Corporation
Waltham, MA 02451 (US)

(72) Inventors:
  • MILLER, Raanan, A.
    Newton, MA 02467 (US)
  • NAZAROV, Erkinjon, G.
    Lexington, MA 02420 (US)
  • KRYLOV, Evgeny
    Las Cruces, NM 88001 (US)
  • EICEMAN, Gary, A.
    Las Cruces, NM 88005 (US)
  • WRIGHT, John, A.
    Waltham, MA 02453 (US)
  • KENDIG, Stephen, D.
    Marblehead, MA 01945 (US)
  • MORRIS, James, C.
    Norfolk, MA 02056 (US)
  • CAMERON, Douglas, B.
    Wellesley, MA 02482 (US)

(74) Representative: Wilson, Alan Stuart 
Barker Brettell 138 Hagley Road Edgbaston
GB-Birmingham B16 9PW
GB-Birmingham B16 9PW (GB)

   


(54) METHOD AND APPARATUS FOR PLASMA GENERATION