(19)
(11)
EP 1 664 853 A2
(12)
(88)
Date of publication A3:
22.09.2005
(43)
Date of publication:
07.06.2006
Bulletin 2006/23
(21)
Application number:
04781410.8
(22)
Date of filing:
17.08.2004
(51)
International Patent Classification (IPC):
G02B
1/00
(1968.09)
(86)
International application number:
PCT/US2004/026708
(87)
International publication number:
WO 2005/019872
(
03.03.2005
Gazette 2005/09)
(84)
Designated Contracting States:
DE
(30)
Priority:
18.08.2003
US 496046 P
(71)
Applicant:
ZYGO CORPORATION
Middlefield, CT 06544-0448 (US)
(72)
Inventor:
EVANS, Christopher James
Higganum, CT 06441 (US)
(74)
Representative:
Cole, David John
46 Kirkhill Gardens, West Greenlees Estate
Cambuslang, Glasgow G72 8EZ
Cambuslang, Glasgow G72 8EZ (GB)
(54)
METHOD AND APPARATUS FOR ALIGNMENT OF A PRECISION OPTICAL ASSEMBLY