(19)
(11) EP 1 664 853 A2

(12)

(88) Date of publication A3:
22.09.2005

(43) Date of publication:
07.06.2006 Bulletin 2006/23

(21) Application number: 04781410.8

(22) Date of filing: 17.08.2004
(51) International Patent Classification (IPC): 
G02B 1/00(1968.09)
(86) International application number:
PCT/US2004/026708
(87) International publication number:
WO 2005/019872 (03.03.2005 Gazette 2005/09)
(84) Designated Contracting States:
DE

(30) Priority: 18.08.2003 US 496046 P

(71) Applicant: ZYGO CORPORATION
Middlefield, CT 06544-0448 (US)

(72) Inventor:
  • EVANS, Christopher James
    Higganum, CT 06441 (US)

(74) Representative: Cole, David John 
46 Kirkhill Gardens, West Greenlees Estate
Cambuslang, Glasgow G72 8EZ
Cambuslang, Glasgow G72 8EZ (GB)

   


(54) METHOD AND APPARATUS FOR ALIGNMENT OF A PRECISION OPTICAL ASSEMBLY