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(11)

EP 1 665 345 A2

(12)

(88) Date of publication A3: 30.06.2005 (43) Date of publication: 07.06.2006 Bulletin 2006/23 (21) Application number: 04784992.2 (22) Date of filing: 24.09.2004

(51) International Patent Classification (IPC):  H01L 21/00(1974.07) (86) International application number: PCT/US2004/031398 (87) International publication number: WO 2005/031812 (07.04.2005 Gazette 2005/14)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR (30) Priority: 26.09.2003 US 672416 (71) Applicant: Rockwell Scientific Licensing LLC Thousand Oaks, California 91358-0085 (US)	(72) Inventors: TENCH, Morgan, D. Camarillo, CA 93010 (US) WHITE, John, T. Lancaster, CA 93536 (US) (74) Representative: Crawford, Andrew Birkby et al A.A. Thornton & Co. 235 High Holborn GB-London WC1V 7LE GB-London WC1V 7LE (GB)