(19)

(11)

EP 1 665 352 A2

(12)

(88) Date of publication A3: 02.02.2006 (43) Date of publication: 07.06.2006 Bulletin 2006/23 (21) Application number: 04809711.7 (22) Date of filing: 10.09.2004

(51) International Patent Classification (IPC):  H01L 21/302(1974.07) H01L 21/00(1974.07) H01L 21/50(1974.07) (86) International application number: PCT/US2004/029383 (87) International publication number: WO 2005/034187 (14.04.2005 Gazette 2005/15)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR Designated Extension States: AL HR LT LV MK (30) Priority: 23.09.2003 US 668489 (71) Applicant: ADVANCED TECHNOLOGY MATERIALS, INC. Danbury, CT 06810 (US)	(72) Inventor: ARNO, Jose, I. Brookfield, Connecticut 06810 (US) (74) Representative: Viering, Jentschura & Partner  Patent- und Rechtsanwälte, Steinsdorfstrasse 6 80538 München 80538 München (DE)