(19)
(11) EP 1 668 677 A1

(12)

(43) Date of publication:
14.06.2006 Bulletin 2006/24

(21) Application number: 04775605.1

(22) Date of filing: 03.09.2004
(51) International Patent Classification (IPC): 
H01L 21/02(1974.07)
(86) International application number:
PCT/SG2004/000283
(87) International publication number:
WO 2005/031819 (07.04.2005 Gazette 2005/14)
(84) Designated Contracting States:
DE FR GB

(30) Priority: 30.09.2003 US 677099

(71) Applicant: Infineon Technologies AG
81669 München (DE)

(72) Inventors:
  • ZHUANG, Haoren
    Wallkill, NY 12589 (US)
  • NAGEL, Nicolas
    01109 Dresden (DE)
  • LIAN, Jingyu
    Wallkill, NY 12589 (US)
  • BRUCHHAUS, Rainer
    80636 Munich (DE)

(74) Representative: Howe, Steven 
Lloyd Wise Commonwealth House, 1-19 New Oxford Street
London WC1A 1LW
London WC1A 1LW (GB)

   


(54) A DEVICE AND A METHOD FOR FORMING A CAPACITOR DEVICE