(19)
(11)
EP 1 668 677 A1
(12)
(43)
Date of publication:
14.06.2006
Bulletin 2006/24
(21)
Application number:
04775605.1
(22)
Date of filing:
03.09.2004
(51)
International Patent Classification (IPC):
H01L
21/02
(1974.07)
(86)
International application number:
PCT/SG2004/000283
(87)
International publication number:
WO 2005/031819
(
07.04.2005
Gazette 2005/14)
(84)
Designated Contracting States:
DE FR GB
(30)
Priority:
30.09.2003
US 677099
(71)
Applicant:
Infineon Technologies AG
81669 München (DE)
(72)
Inventors:
ZHUANG, Haoren
Wallkill, NY 12589 (US)
NAGEL, Nicolas
01109 Dresden (DE)
LIAN, Jingyu
Wallkill, NY 12589 (US)
BRUCHHAUS, Rainer
80636 Munich (DE)
(74)
Representative:
Howe, Steven
Lloyd Wise Commonwealth House, 1-19 New Oxford Street
London WC1A 1LW
London WC1A 1LW (GB)
(54)
A DEVICE AND A METHOD FOR FORMING A CAPACITOR DEVICE