(19)
(11) EP 1 671 135 A2

(12)

(88) Date of publication A3:
02.03.2006

(43) Date of publication:
21.06.2006 Bulletin 2006/25

(21) Application number: 04784469.1

(22) Date of filing: 20.09.2004
(51) International Patent Classification (IPC): 
G01P 9/04(1968.09)
(86) International application number:
PCT/US2004/030614
(87) International publication number:
WO 2005/031257 (07.04.2005 Gazette 2005/14)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL HR LT LV MK

(30) Priority: 25.09.2003 US 505990 P
18.05.2004 US 847750

(71) Applicant: KIONIX, INC.
Ithaca, NY 14850 (US)

(72) Inventors:
  • CHOJNACKI, Eric, P.
    Dryden, NY 13053 (US)
  • SHEN-EPSTEIN, June, P.
    Freeville, NY 13068 (US)
  • NENADIC, Nenad
    Ithaca, NY 14850 (US)
  • STIRLING, Nathan, L.
    Dryden, NY 13053 (US)
  • NISTOR, Vasile
    Los Angeles, CA 90025 (US)

(74) Representative: Stiel, Jürgen 
Geissleite 32
97289 Thüngen
97289 Thüngen (DE)

   


(54) Z-AXIS ANGULAR RATE SENSOR