(19)
(11) EP 1 672 681 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
21.09.2011 Bulletin 2011/38

(45) Mention of the grant of the patent:
11.05.2011 Bulletin 2011/19

(21) Application number: 04792152.3

(22) Date of filing: 07.10.2004
(51) International Patent Classification (IPC): 
H01L 21/027(2006.01)
 G03F 7/20(2006.01)
(86) International application number:
PCT/JP2004/014855
(87) International publication number:
WO 2005/036621 (21.04.2005 Gazette 2005/16)

(54)

EXPOSURE APPARATUS, SUBSTRATE CARRYING METHOD, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

BELICHTUNGSGERÄT, SUBSTRATTRAGEVERFAHREN, BELICHTUNGSVERFAHREN UND VERFAHREN ZUR HERSTELLUNG EINER VORRICHTUNG

APPAREIL D'EXPOSITION, PROCEDE DE TRANSPORT DE SUBSTRAT, PROCEDE D'EXPOSITION, ET PROCEDE DE PRODUCTION D'UN DISPOSITIF

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(30) Priority: 08.10.2003 JP 2003349550

(43) Date of publication of application:
21.06.2006 Bulletin 2006/25

(73) Proprietors:
  • Miyagi Nikon Precision Co., Ltd.
    Zao-machi, Katta-gun Miyagi 989-0701 (JP)
  • NIKON CORPORATION
    Chiyoda-ku Tokyo 100-8331 (JP)

(72) Inventors:
  • OHTA, Atsushi
    Miyagi 989-0701 (JP)
  • HORIUCHI, Takashi
    Tokyo (JP)

(74) Representative: HOFFMANN EITLE 
Patent- und Rechtsanwälte Arabellastraße 4
81925 München
81925 München (DE)


(56) References cited: : 
EP-A- 0 605 103
JP-A- 6 124 873
JP-A- 63 073 628
US-A- 5 274 434
US-A1- 2003 013 026
 WO-A-99/49504
JP-A- 6 168 866
JP-A- 2000 180 371
US-A- 5 444 529
US-B1- 6 281 962
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).