| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
|
|
Designated Extension States: |
|
AL HR LT LV MK |
| (30) |
Priority: |
25.09.2003 US 506354 P
21.09.2004 US 946849
|
| (71) |
Applicant: Aviza Technology, Inc. |
|
Scotts Valley, CA 95066-4081 (US) |
|
| (72) |
Inventors: |
|
- DU BOIS, Dale, R.
Los Gatos, CA 95032 (US)
- PORTER, Cole
San Jose, CA 95123 (US)
- HERRING, Robert, B.
San Jose, CA 95129 (US)
|
| (74) |
Representative: Dunlop, Brian Kenneth Charles et al |
|
Wynne-Jones, Lainé & James
22 Rodney Road
Cheltenham
Gloucestershire GL50 1JJ
Cheltenham
Gloucestershire GL50 1JJ (GB) |
|
