(19)

(11)

EP 1 676 303 A2

(12)

(88) Date of publication A3: 15.09.2005 (43) Date of publication: 05.07.2006 Bulletin 2006/27 (21) Application number: 04817126.8 (22) Date of filing: 24.09.2004

(51) International Patent Classification (IPC):  H01L 21/3105(1990.01) (86) International application number: PCT/US2004/031995 (87) International publication number: WO 2005/034194 (14.04.2005 Gazette 2005/15)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR (30) Priority: 08.10.2003 US 510024 P 15.09.2004 US 940682 (71) Applicant: Honeywell International Inc. Morristown, New Jersey 07960 (US)	(72) Inventors: BHANAP, Anil, S. Milpitas, CA 95035 (US) RAMOS, Teresa, A. San Jose, CA 95112 (US) IWAMOTO, Nancy Ramona, CA 92065 (US) LEUNG, Roger, Y. San Jose, CA 95120 (US) NAMAN, Ananth San Jose, CA 95118 (US) (74) Representative: Hucker, Charlotte Jane  Gill Jennings & Every LLP Broadgate House 7 Eldon Street London EC2M 7LH London EC2M 7LH (GB)