| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
|
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Designated Extension States: |
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AL HR LT LV MK |
| (30) |
Priority: |
21.10.2003 US 690864
24.10.2003 US 693668
14.06.2004 US 867458
|
| (71) |
Applicant: SEMITOOL, INC. |
|
Kalispell,
Montana 59901 (US) |
|
| (72) |
Inventors: |
|
- HANSON, Kyle, M.
Kalispell, MT 59901 (US)
- LUND, Eric
Bellevue, WA 98006 (US)
- GROVE, Coby
Whitefish, MT 59937 (US)
- PEACE, Steven, L.
Whitefish, MT 59937 (US)
- Wirth, Paul Z.
Whitefish, MT 59937 (US)
- BRUNER, Scott, A.
Kalispell, MT 55901 (US)
- KUNTZ, Jonathan
Kalispell, MT 59901 (US)
|
| (74) |
Representative: Viering, Jentschura & Partner |
|
Postfach 22 14 43
80504 München
80504 München (DE) |
|
