(19)

(11)

EP 1 678 745 A2

(12)

(43) Date of publication: 12.07.2006 Bulletin 2006/28 (21) Application number: 04794543.1 (22) Date of filing: 06.10.2004

(51) International Patent Classification (IPC):  H01L 21/00(1974.07) (86) International application number: PCT/US2004/033225 (87) International publication number: WO 2005/036605 (21.04.2005 Gazette 2005/16)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR Designated Extension States: AL HR LT LV MK (30) Priority: 07.10.2003 US 680995 (71) Applicant: Strasbaugh San Luis Obispo, CA 93401 (US)	(72) Inventor: SPIEGEL, Larry, A. San Luis Obispo, CA 93401 (US) (74) Representative: Viering, Jentschura & Partner  Steinsdorfstrasse 6 80538 München 80538 München (DE)