(19)

(11)

EP 1 680 535 A2

(12)

(88) Date of publication A3: 12.01.2006 (43) Date of publication: 19.07.2006 Bulletin 2006/29 (21) Application number: 04794546.4 (22) Date of filing: 08.10.2004

(51) International Patent Classification (IPC):  C25D 15/02(1974.07) C25D 5/50(1974.07) H01L 21/445(1974.07) C25D 5/48(1974.07) C25D 3/38(1974.07) (86) International application number: PCT/US2004/033229 (87) International publication number: WO 2005/040459 (06.05.2005 Gazette 2005/18)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR Designated Extension States: AL HR LT LV MK (30) Priority: 16.10.2003 US 688420 (71) Applicant: SEMITOOL, INC. Kalispell, Montana 59901 (US)	(72) Inventors: KLOCKE, John, L. Kalispell, MT 59901 (US) CHEN, Linlin Plano, TX 75025 (US) (74) Representative: Boakes, Jason Carrington  Harrison Goddard Foote 31 St Saviourgate York YO1 8NQ York YO1 8NQ (GB)