(19)

(11)

EP 1 683 209 A2

(12)

(88) Date of publication A3: 28.07.2005 (43) Date of publication: 26.07.2006 Bulletin 2006/30 (21) Application number: 04800977.3 (22) Date of filing: 10.11.2004

(51) International Patent Classification (IPC):  H01L 51/10(2006.01) H01L 23/10(2006.01) H01L 23/26(2006.01) H01L 21/50(2006.01) (86) International application number: PCT/US2004/037597 (87) International publication number: WO 2005/050751 (02.06.2005 Gazette 2005/22)

(84) Designated Contracting States: DE FR GB NL (30) Priority: 12.11.2003 US 519139 P 15.10.2004 US 619222 P (71) Applicant: E.I. DUPONT DE NEMOURS AND COMPANY Wilmington, Delaware 19898 (US)	(72) Inventors: TREMEL, James, Daniel Santa Barbara, CA 93105 (US) HUBERT, Matthew, Dewey Columbia, SC 29210 (US) (74) Representative: Hughes, Andrea Michelle  Frank B. Dehn & Co. St Bride's House 10 Salisbury Square London EC4Y 8JD London EC4Y 8JD (GB)