(19)

(11)

EP 1 689 907 A2

(12)

(88) Date of publication A3: 06.07.2006 (43) Date of publication: 16.08.2006 Bulletin 2006/33 (21) Application number: 04755834.1 (22) Date of filing: 21.06.2004

(51) International Patent Classification (IPC):  C23C 16/00(2006.01) C23F 1/02(2006.01) (86) International application number: PCT/US2004/019931 (87) International publication number: WO 2004/114461 (29.12.2004 Gazette 2004/53)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR Designated Extension States: AL HR LT LV MK (30) Priority: 19.06.2003 US 480338 P (71) Applicant: Plasma Control Systems LLC South Pasadena, CA 91030 (US)	(72) Inventor: PRIBYL, Patrick South Pasadena, CA 91030 (US) (74) Representative: Jones Day  Rechtsanwälte, Attorneys-at-Law, Patentanwälte Prinzregentenstrasse 11 80538 München 80538 München (DE)