METHODS FOR MAKING VERTICAL ELECTRICAL FEED THROUGH STRUCTURES - Patent 1690283

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EP 1 690 283 A2

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(88)	Date of publication A3:
	24.11.2005

(43)	Date of publication:
	16.08.2006 Bulletin 2006/33

(21)	Application number: 04812006.7

(22)	Date of filing: 22.11.2004

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International Patent Classification (IPC):

H01K 3/10^(2006.01)

(86)	International application number:
	PCT/US2004/039394

(87)	International publication number:
	WO 2005/055369 (16.06.2005 Gazette 2005/24)

(84)	Designated Contracting States:
	DE FR IT

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Priority:

26.11.2003 US 723263
26.11.2003 US 723269

(71)	Applicant: FormFactor, Inc.
	Livermore, CA 94551 (US)

(72)	Inventors:
	MATHIEU, Gaetan, L. Varennes, QC J3X 1P7 (CA) KHANDROS, Igor, K. Orinda, CA 94563 (US) REYNOLDS, Carl, V. Pleasanton, CA 94566 (US)

(74)	Representative: Käck, Jürgen
	Kahler Käck Mollekopf Vorderer Anger 239 86899 Landsberg 86899 Landsberg (DE)

(54)	METHODS FOR MAKING VERTICAL ELECTRICAL FEED THROUGH STRUCTURES