| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI
SK TR |
| (30) |
Priority: |
12.12.2003 US 735216
12.12.2003 US 734704
|
| (71) |
Applicant: LAM RESEARCH CORPORATION |
|
Fremont, CA 94538-6401 (US) |
|
| (72) |
Inventors: |
|
- DORDI, Yezdi
Palo Alto, CA 94303 (US)
- BOYD, John
Atascadero, CA 93422 (US)
- THIE, William
Mountain View, CA 94040 (US)
- MARASCHIN, Bob
Cupertino, CA 95014 (US)
- REDEKER, Fred, C.
Fremont, CA 94539 (US)
- COOK, Joel, M.
Warrenton, VA 20186 (US)
|
| (74) |
Representative: Wombwell, Francis et al |
|
Potts, Kerr & Co.
15, Hamilton Square
Birkenhead
Merseyside CH41 6BR
Birkenhead
Merseyside CH41 6BR (GB) |
|
