(19)
(11) EP 1 692 460 A1

(12)

(43) Date of publication:
23.08.2006 Bulletin 2006/34

(21) Application number: 04800335.4

(22) Date of filing: 17.11.2004
(51) International Patent Classification (IPC): 
G01B 11/30(2006.01)
(86) International application number:
PCT/SE2004/001672
(87) International publication number:
WO 2005/047816 (26.05.2005 Gazette 2005/21)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LU MC NL PL PT RO SE SI SK TR

(30) Priority: 17.11.2003 SE 0303048

(71) Applicant: OPTONOVA AB
171 48 Solna (SE)

(72) Inventor:
  • AHLEN, Hans
    S-113 56 Stockholm (SE)

(74) Representative: Johansson Webjörn, Ingmari 
Zacco Sweden AB, Box 23101
104 35 Stockholm
104 35 Stockholm (SE)

   


(54) SCANNING AND MEASURING OF SURFACE FEATURES