(19)
(11)
EP 1 692 460 A1
(12)
(43)
Date of publication:
23.08.2006
Bulletin 2006/34
(21)
Application number:
04800335.4
(22)
Date of filing:
17.11.2004
(51)
International Patent Classification (IPC):
G01B
11/30
(2006.01)
(86)
International application number:
PCT/SE2004/001672
(87)
International publication number:
WO 2005/047816
(
26.05.2005
Gazette 2005/21)
(84)
Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LU MC NL PL PT RO SE SI SK TR
(30)
Priority:
17.11.2003
SE 0303048
(71)
Applicant:
OPTONOVA AB
171 48 Solna (SE)
(72)
Inventor:
AHLEN, Hans
S-113 56 Stockholm (SE)
(74)
Representative:
Johansson Webjörn, Ingmari
Zacco Sweden AB, Box 23101
104 35 Stockholm
104 35 Stockholm (SE)
(54)
SCANNING AND MEASURING OF SURFACE FEATURES