APPARATUS AND METHOD FOR REDUCING ELECTRICAL NOISE IN A THERMALLY CONTROLLED CHUCK - Patent 1692714

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EP 1 692 714 A1

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(43)	Date of publication:
	23.08.2006 Bulletin 2006/34

(21)	Application number: 04812337.6

(22)	Date of filing: 23.11.2004

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International Patent Classification (IPC):

H01L 21/00^(2006.01)

(86)	International application number:
	PCT/US2004/039798

(87)	International publication number:
	WO 2005/055291 (16.06.2005 Gazette 2005/24)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LU MC NL PL PT RO SE SI SK TR

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Priority:

26.11.2003 US 526030 P
23.11.2004 US 997017

(71)	Applicant: Temptronic Corporation
	Newton, MA 02067-1653 (US)

(72)	Inventors:
	HUDSON, Douglas, E. Hopkinton, MA 01748 (US) PERLIN, James Taunton, MA 02780 (US) PATEL, Sanjiv Bellingham, MA 02019 (US) TEE, Chin, Chien banting Senagor D.E. 42700 (MY) COLE, Kenneth, M., Sr. Holliston, MA 07146 (US)

(74)	Representative: Greenwood, John David et al
	Graham Watt & Co LLP St Botolph's House 7-9 St Botolph's Road Sevenoaks Kent TN13 3AJ Sevenoaks Kent TN13 3AJ (GB)

(54)	APPARATUS AND METHOD FOR REDUCING ELECTRICAL NOISE IN A THERMALLY CONTROLLED CHUCK