(19)

(11)

EP 1 694 880 A2

(12)

(88) Date of publication A3: 24.11.2005 (43) Date of publication: 30.08.2006 Bulletin 2006/35 (21) Application number: 04817552.5 (22) Date of filing: 09.12.2004

(51) International Patent Classification (IPC):  C23C 2/30(2006.01) C23C 2/06(2006.01) C23C 2/02(2006.01) (86) International application number: PCT/EP2004/014154 (87) International publication number: WO 2005/056867 (23.06.2005 Gazette 2005/25)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR (30) Priority: 09.12.2003 EP 03078869 17.12.2003 US 529946 P (71) Applicant: Umicore 1000 Brussels (BE)	(72) Inventor: GILLES, Michael B-2440 Geel (BE) (74) Representative: Knockaert, Guy  Umicore Patent Department Kasteelstraat 7 2250 Olen 2250 Olen (BE)