(19)
(11) EP 1 694 885 A2

(12)

(43) Date of publication:
30.08.2006 Bulletin 2006/35

(21) Application number: 04760000.2

(22) Date of filing: 16.04.2004
(51) International Patent Classification (IPC): 
C25D 1/00(2006.01)
(86) International application number:
PCT/US2004/012012
(87) International publication number:
WO 2004/094702 (04.11.2004 Gazette 2004/45)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(30) Priority: 18.04.2003 US 463860 P
18.04.2003 US 463970 P
18.04.2003 US 463861 P
18.04.2003 US 463956 P
18.04.2003 US 463862 P

(71) Applicants:
  • APPLIED MATERIALS, INC.
    Santa Clara, California 95054 (US)
  • Ellwanger, Russell C.
    San Juan Bautista, CA 95045 (US)

(72) Inventors:
  • YANG, Michael, X.
    Palo Alto, CA 94306 (US)
  • XI, Ming
    Palo Alto, CA 94306 (US)
  • BRITCHER, Eric, B.
    Rancho Cucamonga, CA 91730 (US)
  • DONOSO, Bernardo
    San Jose, CA 95125 (US)
  • PANG, Lily, L.
    Fremont, CA 95125 (US)
  • SHERMAN, Svetlana
    San Jose, CA 95117 (US)
  • HO, Henry
    San Jose, CA 95120 (US)
  • NGUYEN, Anh, N.
    Milpitas, CA 95035 (US)
  • LERNER, Alexander, N.
    San Jose, CA 95120 (US)
  • D'AMBRA, Allen, L.
    Burlingame, CA 94010 (US)
  • SHANMUGASUNDRAM, Arulkumar
    Sunnyvale, CA 94086 (US)
  • ISHIKAWA, Tetsuya
    Saratoga, CA 95070 (US)
  • RABINOVICH, Yevgeniy
    Fremont, CA 94539 (US)
  • LUBOMIRSKY, Dmitry
    Cupertino, CA 95014 (US)
  • MOK, Yeuk-Fai, Edwin
    San Francisco, CA 94132 (US)
  • NGUYEN, Son, T.
    San Jose, CA 95136 (US)

(74) Representative: Bayliss, Geoffrey Cyril 
BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB)

   


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