| (84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
|
| (30) |
Priority: |
18.04.2003 US 463860 P
18.04.2003 US 463970 P
18.04.2003 US 463861 P
18.04.2003 US 463956 P
18.04.2003 US 463862 P
|
| (71) |
Applicants: |
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- APPLIED MATERIALS, INC.
Santa Clara, California 95054 (US)
- Ellwanger, Russell C.
San Juan Bautista, CA 95045 (US)
|
|
| (72) |
Inventors: |
|
- YANG, Michael, X.
Palo Alto, CA 94306 (US)
- XI, Ming
Palo Alto, CA 94306 (US)
- BRITCHER, Eric, B.
Rancho Cucamonga, CA 91730 (US)
- DONOSO, Bernardo
San Jose, CA 95125 (US)
- PANG, Lily, L.
Fremont, CA 95125 (US)
- SHERMAN, Svetlana
San Jose, CA 95117 (US)
- HO, Henry
San Jose, CA 95120 (US)
- NGUYEN, Anh, N.
Milpitas, CA 95035 (US)
- LERNER, Alexander, N.
San Jose, CA 95120 (US)
- D'AMBRA, Allen, L.
Burlingame, CA 94010 (US)
- SHANMUGASUNDRAM, Arulkumar
Sunnyvale, CA 94086 (US)
- ISHIKAWA, Tetsuya
Saratoga, CA 95070 (US)
- RABINOVICH, Yevgeniy
Fremont, CA 94539 (US)
- LUBOMIRSKY, Dmitry
Cupertino, CA 95014 (US)
- MOK, Yeuk-Fai, Edwin
San Francisco, CA 94132 (US)
- NGUYEN, Son, T.
San Jose, CA 95136 (US)
|
| (74) |
Representative: Bayliss, Geoffrey Cyril |
|
BOULT WADE TENNANT,
Verulam Gardens
70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB) |
|
