(19)

(11)

EP 1 695 054 A1

(12)

(43) Date of publication: 30.08.2006 Bulletin 2006/35 (21) Application number: 03819283.7 (22) Date of filing: 20.12.2003

(51) International Patent Classification (IPC):  G01J 5/20(2006.01) G01J 3/36(2006.01) H01L 27/14(2006.01) (86) International application number: PCT/US2003/040604 (87) International publication number: WO 2005/068955 (28.07.2005 Gazette 2005/30)

(84) Designated Contracting States: DE FR GB (71) Applicant: Honeywell International Inc. Morristown, New Jersey 07960 (US)	(72) Inventor: WOOD, Roland, A. Bloomington, MN 55420 (US) (74) Representative: Haley, Stephen  Gill Jennings & Every LLP Broadgate House 7 Eldon Street London EC2M 7LH London EC2M 7LH (GB)