(19)

(11)

EP 1 697 798 A2

(12)

(88) Date of publication A3: 09.02.2006 (43) Date of publication: 06.09.2006 Bulletin 2006/36 (21) Application number: 04803712.1 (22) Date of filing: 10.12.2004

(51) International Patent Classification (IPC):  G03F 7/20(2006.01) (86) International application number: PCT/EP2004/014062 (87) International publication number: WO 2005/059617 (30.06.2005 Gazette 2005/26)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR LV MK YU (30) Priority: 15.12.2003 US 734623 19.12.2003 US 530623 P 22.12.2003 US 530978 P 14.01.2004 US 536248 P 13.02.2004 US 544967 P 04.05.2004 US 568006 P 14.07.2004 US 587504 P 27.07.2004 US 591775 P 29.07.2004 US 592208 P 24.09.2004 US 612823 P 13.10.2004 US 617674 P 22.10.2004 DE 102004051730 (71) Applicant: Carl Zeiss SMT AG 73446 Oberkochen (DE)

(72) Inventors: BEDER, Susanne 73434 Aalen (DE) SINGER, Wolfgang 73431 Aalen (DE) (74) Representative: Ruff, Michael  Patentanwälte Ruff, Wilhelm, Beier, Dauster & Partner Postfach 10 40 36 70035 Stuttgart 70035 Stuttgart (DE)