(19)

(11)

EP 1 697 971 A1

(12)

(43) Date of publication: 06.09.2006 Bulletin 2006/36 (21) Application number: 04815751.5 (22) Date of filing: 21.12.2004

(51) International Patent Classification (IPC):  H01L 21/00(2006.01) (86) International application number: PCT/US2004/043740 (87) International publication number: WO 2005/064652 (14.07.2005 Gazette 2005/28)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR (30) Priority: 23.12.2003 US 746114 31.03.2004 US 816337 (71) Applicant: LAM RESEARCH CORPORATION Fremont, CA 94538 (US)	(72) Inventors: DE LARIOS, John, M. Palo Alto, CA 94303 (US) OWCZARZ, Aleksander San Jose, CA 95135 (US) SCHOEPP, Alan Ben Lomond, CA 95005 (US) REDEKER, Fritz Fremont, CA 94539 (US) (74) Representative: Wombwell, Francis et al Potts, Kerr & Co. 15, Hamilton Square Birkenhead Merseyside CH41 6BR Birkenhead Merseyside CH41 6BR (GB)