| (84) |
Etats contractants désignés: |
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CH DE DK FR GB LI SE |
| (30) |
Priorité: |
23.12.2003 FR 0351192
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| (43) |
Date de publication de la demande: |
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13.09.2006 Bulletin 2006/37 |
| (73) |
Titulaires: |
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- Horiba Jobin Yvon SAS
91165 Longjumeau Cédex (FR)
- SYNCHROTRON SOLEIL
91190 St. Aubin (FR)
Etats contractants désignés:
DE DK FR GB SE
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| (72) |
Inventeurs: |
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- POLACK, François
F-75013 PARIS (FR)
- IDIR, Mourad
F-91120 PALAISEAU (FR)
- JOURDAIN, Erick
F-93170 BAGNOLET (FR)
- LIARD-CLOUP, Audrey
F-92340 BOURG-LA-REINE (FR)
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| (74) |
Mandataire: Michelet, Alain et al |
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Cabinet HARLE et PHELIP
14-16, rue Ballu
75009 Paris
75009 Paris (FR) |
| (56) |
Documents cités: :
US-A- 4 798 446
US-A- 5 119 231
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US-A- 4 915 463
US-A- 5 958 605
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- HEINZMANN U: "X-RAY GRATINGS AND PROJECTION LITHOGRAPHY BY MEANS OF LATERALLY STRUCTURED
MULTILAYERS" JOURNAL DE PHYSIQUE III, EDITIONS DE PHYSIQUE, PARIS, FR, vol. 4, no.
9, 1 septembre 1994 (1994-09-01), pages 1625-1637, XP000468494 ISSN: 1155-4320
- VERNON S P ET AL: "CHIRPED MULTILAYER COATINGS FOR INCREASED X-RAY THROUGHPUT" OPTICS
LETTERS, OPTICAL SOCIETY OF AMERICA, WASHINGTON, US, vol. 18, no. 9, 1 mai 1993 (1993-05-01),
pages 672-674, XP000362414 ISSN: 0146-9592
- U. KLEINEBERG ET AL.: "Mo/Si Multilayer Coated Laminar Phase and Ruled Blaze Gratings
for the Soft X-Ray Region" J.OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1996,
pages 389-392, XP002326213
- TROUSSEL P ET AL: "TESTS OF 250-NM PITCH MULTILAYER GRATINGS IN THE XUV LOW-ENERGY
RANGE ON THE SUPER-ACO STORAGE RING AT LURE" REVIEW OF SCIENTIFIC INSTRUMENTS, AMERICAN
INSTITUTE OF PHYSICS. NEW YORK, US, vol. 63, no. 4, 1 avril 1992 (1992-04-01), pages
2125-2131, XP000300692 ISSN: 0034-6748
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