(19)
(11) EP 1 702 350 A2

(12)

(43) Date of publication:
20.09.2006 Bulletin 2006/38

(21) Application number: 04812491.1

(22) Date of filing: 30.11.2004
(51) International Patent Classification (IPC): 
H01L 21/00(2006.01)
(86) International application number:
PCT/US2004/039970
(87) International publication number:
WO 2005/057631 (23.06.2005 Gazette 2005/25)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LU MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL HR LT LV MK YU

(30) Priority: 02.12.2003 US 725850

(71) Applicant: International Business Machines Corporation
Armonk, N.Y. 10504 (US)

(72) Inventors:
  • DE SOUZA, Joel, P.
    Putnam Valley, NY 10579 (US)
  • OTT, John, A.
    Greenwood Lake, NY 10925 (US)
  • REZNICEK, Alexander
    Mount Kisco, NY 10549 (US)
  • SAENGER, Katherine, L.
    Ossining, NY 10562 (US)

(74) Representative: Williams, Julian David 
IBM United Kingdom Limited Intellectual Property Law Hursley Park
Winchester Hampshire SO21 2JN
Winchester Hampshire SO21 2JN (GB)

   


(54) PLANAR SUBSTRATE WITH SELECTED SEMICONDUCTOR CRYSTAL ORIENTATIONS FORMED BY LOCALIZED AMORPHZATION AND RECRYSTALLIZATION OF STACKED TEMPLATE LAYERS