VERTICAL GATE CMOS WITH LITHOGRAPHY-INDEPENDENT GATE LENGTH - Patent 1709680

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EP 1 709 680 A2

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(88)	Date of publication A3:
	08.12.2005

(43)	Date of publication:
	11.10.2006 Bulletin 2006/41

(21)	Application number: 05705754.9

(22)	Date of filing: 18.01.2005

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International Patent Classification (IPC):

H01L 21/8238^(2006.01)
H01L 29/73^(2006.01)

H01L 27/10^(2006.01)

(86)	International application number:
	PCT/US2005/001313

(87)	International publication number:
	WO 2005/072154 (11.08.2005 Gazette 2005/32)

(84)	Designated Contracting States:
	DE FR GB IT

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Priority:

21.01.2004 US 761876

(71)	Applicant: ATMEL CORPORATION
	San Jose, California 95131 (US)

(72)	Inventor:
	LOJEK, Bohumil Colorado Springs, CO 80906 (US)

(74)	Representative: Käck, Jürgen et al
	Patentanwälte Kahler Käck Mollekopf Vorderer Anger 239 86899 Landsberg 86899 Landsberg (DE)

(54)	VERTICAL GATE CMOS WITH LITHOGRAPHY-INDEPENDENT GATE LENGTH