| (84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI
SK TR |
| (30) |
Priority: |
16.01.2004 US 758825
23.02.2004 US 784750
|
| (71) |
Applicant: ADVANCED TECHNOLOGY MATERIALS, INC. |
|
Danbury, CT 06810 (US) |
|
| (72) |
Inventors: |
|
- CHEN, Philip, S., H.
Bethel, Connecticut 06801 (US)
- CHEN, Ing-Shin
Danbury, Connecticut 06810 (US)
- DIMEO, Frank, Jr.
Danbury, Connecticut 06810 (US)
- NEUNER, Jeffrey, W.
Bethel, Connecticut 06801 (US)
- WELCH, James
New Fairfield, Connecticut 06812 (US)
- ROEDER, Jeffrey, F.
Brookfield, Connecticut 06804 (US)
|
| (74) |
Representative: Harrison, Robert John et al |
|
Sonnenberg Fortmann
Herzogspitalstrasse 10a
80331 München
80331 München (DE) |
|
