(19)
(11) EP 1 719 162 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
11.05.2016 Bulletin 2016/19

(45) Mention of the grant of the patent:
23.03.2016 Bulletin 2016/12

(21) Application number: 05711379.7

(22) Date of filing: 12.01.2005
(51) International Patent Classification (IPC): 
H01L 21/027(2006.01)
H01L 21/28(2006.01)
H01L 29/78(2006.01)
 H01L 21/3213(2006.01)
H01L 29/66(2006.01)
H01L 21/033(2006.01)
(86) International application number:
PCT/US2005/000961
(87) International publication number:
WO 2005/082122 (09.09.2005 Gazette 2005/36)

(54)

METHOD OF MAKING A SEMICONDUCTOR DEVICE USING TREATED PHOTORESIST

VERFAHREN ZUR HERSTELLUNG EINER HALBLEITERVORRICHTUNG UNTER VERWENDUNG EINES BEHANDELTEN FOTOLACKS

PROCEDE DE FABRICATION D'UN DISPOSITIF SEMICONDUCTEUR AU MOYEN D'UNE PHOTORESINE TRAITEE

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR

(30) Priority: 13.02.2004 US 779007

(43) Date of publication of application:
08.11.2006 Bulletin 2006/45

(73) Proprietor: North Star Innovations Inc.
Costa Mesa, CA 92626 (US)

(72) Inventors:
  • GARZA, Cesar, M.
    Round Rock, TX 78681 (US)
  • DARLINGTON, William, D.
    Austin, TX 78737 (US)
  • FILIPIAK, Stanley, M.
    Pflugerville, TX 78660 (US)
  • VASEK, James, E.
    Austin, 78732 (US)

(74) Representative: Wray, Antony John et al
Optimus Patents Limited Grove House Lutyens Close
Chineham Court Basingstoke Hampshire RG24 8AG
Chineham Court Basingstoke Hampshire RG24 8AG (GB)


(56) References cited: : 
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US-A1- 2003 219 683
US-B1- 6 589 709
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US-B2- 6 630 288
US-B2- 6 815 359
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US-A1- 2002 142 607
US-A1- 2004 244 912
US-B1- 6 589 709
US-B2- 6 630 288
US-B2- 6 716 571
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).